[1]王秀琴,袁宁一,范利宁,等.Mg2 + 掺杂对ZnO 薄膜结构和光学性能的影响[J].常州大学学报(自然科学版),2007,(03):1-3.
　WANG Xiu - qin,YUAN Ning - yi,FAN Li - ning,et al.Influence of Mg2 + Doping on Structure and Optical Property of ZnO Films[J].Journal of Changzhou University(Natural Science Edition),2007,(03):1-3.
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Mg2 + 掺杂对ZnO 薄膜结构和光学性能的影响()
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常州大学学报(自然科学版)[ISSN:2095-0411/CN:32-1822/N]

卷:
期数:
2007年03期
页码:
1-3
栏目:
出版日期:
2007-09-25

文章信息/Info

Title:
Influence of Mg2 + Doping on Structure and Optical Property of ZnO Films
作者:
王秀琴;  袁宁一;  范利宁;  李金华
江苏工业学院功能材料实验室, 江苏 常州 213164
Author(s):
WANG Xiu - qin ;  YUAN Ning - yi ;  FAN Li - ning ;  L I J in - hua
Laboratory of Functional Materials , J iangsu Polytechnic University , Changzhou 213164 , China
关键词:
Mg xZn1 - xO 薄膜;  溶胶- 凝胶法;  禁带宽度;  透过率
Keywords:
Mg xZn1 - xO thin films ;  sol - gel method ;  band gap ;  t ransmittance
分类号:
TB 43 ; O 484.4 　
文献标志码:
A
摘要:
利用溶胶- 凝胶法在(100) Si 片和玻璃衬底上制备出Mg2 + 掺杂的ZnO (Mg xZn1 - xO) 薄膜, 研究了Mg2 + 掺杂对ZnO 薄膜结构和光学性能的影响。XRD 图谱表明, 当x < 0130 时, Mg xZn1 - xO 薄膜为纤锌矿结构, 随着x 值的增加, 晶格常数c 逐渐减小, a 逐渐增大, 但晶胞体积V 几乎不变; 当013 ≤x < 017 时出现相分离; 当x ≥017 时, Mg xZn1 - xO 薄膜为MgO 的 立方相结构。紫外可见光透射光谱表明, Mg2 + 掺杂增大ZnO 薄膜的禁带宽度, 同时也提高可见光的透过率。
Abstract:
Zinc oxide thin films doped with Mg2 + (Mg xZn1 - xO) were prepared on (100) silicon and glass subst rates by the sol - gel method. The influence of Mg2 + dopants on the microst ructure and optical property of Mg xZn1 - xO thin films were investigated in detail. The XRD results indicated that when the value of x was smaller than 013 the Mg xZn1 - xO thin films retained the wurtzite st ructure of ZnO. With the increase of the value of x the lattice constant s c decreased and the lattice constants a increased , but the cell volume hardly changed. As the value of x was between 013 and 017 , phase separation was observed. When the value of x was larger than 017 , the crystalline st ructure of Mg xZn1 - xO thin films changed to the cubic structure of MgO. The t ransmittance measurement results showed that Mg2 + doping in ZnO thin films enlarged the band gap and the t ransmittance in the visible region.

参考文献/References:

[1] 袁宁一, 李金华, 范利宁, 等1 氧化锌薄膜p 型掺杂研究现状 [J] 1 江苏工业学院学报, 2005 , 17 (4) : 54 - 57.
[2] 张德恒, 张锡键, 王卿璞, 等1MgZnO 薄膜及其量子阱和超 晶格的发光特性[J] 1 发光学报, 2004 , 25 (2) : 111 - 134.
[3] Dongxu Zhao , Yichun Liu , Dezhen Shen , et al. Structural and optical properties of Mg xZn1 - xO thin films prepared by the sol - gel method [J] . Journal of Crystal Growth , 2002 , 234 : 427 - 430.
[4] OhotomoA , Kawasakim , KoidaT , et al. Mg xZn1 - xO as a Ⅱ- Ⅳwidegap semiconductor alloy [J] . Appl Phys Lett , 1998 , 72 (19) : 2 466 - 2 468.
[5] TaKashi Minemoto , Takayuki Negami , Shiro Nishiwaki , et al. Preparation of Zn1 - x Mg xO films by radio frequency magnetron sputtering [J] . Thin Solid Films , 2000 , 372 : 173 - 176.

备注/Memo

备注/Memo:
基金项目: 江苏省自然科学基金项目(BK2006042) 作者简介: 王秀琴(1978 - ) , 女, 辽宁丹东人, 硕士, 讲师; 通讯作者: 袁宁一。
更新日期/Last Update: 2007-09-25