[1]李振国,于靖军.一种新型的大行程XY柔性并联微定位平台[J].常州大学学报(自然科学版),2013,(04):14-19.[doi:10.3969/j.issn.2095-0411.2013.04.003]
　LI Zhen guo,YU Jing jun.A Novel Large Range XY Compliant Parallel Micromanipulator[J].Journal of Changzhou University(Natural Science Edition),2013,(04):14-19.[doi:10.3969/j.issn.2095-0411.2013.04.003]
点击复制

一种新型的大行程XY柔性并联微定位平台()
分享到：

常州大学学报(自然科学版)[ISSN:2095-0411/CN:32-1822/N]

卷:
期数:
2013年04期
页码:
14-19
栏目:
出版日期:
2013-09-30

文章信息/Info

Title:
A Novel Large Range XY Compliant Parallel Micromanipulator
作者:
李振国; 于靖军
北京航空航天大学 机械工程及自动化学院,北京 100191
Author(s):
LI Zhen guo; YU Jing jun
School of Mechanical Engineering and Automation,Beijing University of Aeronautics and Astronautics,Beijing 100191,China
关键词:
柔性并联微定位平台;  大行程;  交叉轴解耦;  柔度矩阵
Keywords:
XY compliant parallel micro positioning stage;  large range motion;  cross axis decoupling;  compliance matrix
分类号:
TH 112
DOI:
10.3969/j.issn.2095-0411.2013.04.003
文献标志码:
A
摘要:
大行程高精度柔性并联微定位平台的需求与日俱增。提出了一种新颖的大行程XY柔性并联微定位平台,它具有镜面对称的结构和冗余约束特性,镜像对称结构能够很好地约束了面内寄生转角和交叉轴耦合,冗余约束在提高系统刚度的同时还降低了运动平台的质量。建立了柔性微定位平台的柔度矩阵模型,用于确定尺寸参数。最后,通过有限元模型分析,并与理论模型对比。结果显示本文所设计的柔性并联微定位平台具有如下特点:20 mm×20 mm的大运动行程,两运动轴之间具有较高的解耦度,很好地约束了面内寄生转角,其值小于1
Abstract:
The need for a compliant parallel micro positioning stage(CPMS)providing large motion range and high precision is increasing. This paper presents a novel large range XY CPMS with a mirror symmetry structure and a redundant constraint characteristic. The m

参考文献/References:

1. Smith S T,Chetwynd D G.Foundations of ultraprecision mechanism design[J].Gordon and Breach Science, 1992, 6(1):10-19.
2. Ananthasuresh G K, Sridhar K.Designing compliant mechanisms[J].Mechanical Engineering, 1995,117(11): 93-96.
3. Salaita K, Wang Y, Mirkin C A.Applications of dip-pen nanolithography[J].Nature Nanotechnology, 2007, 2(3): 145-155.
4. Schitter G, Thurner P J, Hansma P K.Design and input-shaping control of a novel scanner for high-speed atomic force microscopy[J].Mechatronics, 2008, 18(5): 282-288.
5. Ding H, Xiong Z.Motion stages for electronic packaging design and control[J].Robotics & Automation Magazine, IEEE, 2006, 13(4): 51-61.
6. Vettiger P, Despont M, Drechsler U, et al.The “Millipede”—More than thousand tips for future AFM storage[J].IBM Journal of Research and Development, 2000,44(3):323-340.
7. Awtar S, Parmar G.Design of a large range XY nanopositioning system[C]//Proceedings of the ASME 2010 International Design Engineering Technical Conferences and Information in Engineering Conference.Montreal: ASME IDETC/CIE, 2010: 387-399.
8. Awtar S, Slocum A H.Constraint-based design of parallel kinematic XY flexure mechanisms[J].Journal of Mechanical Design, 2007, 129: 816.
9. Awtar S.Analysis and synthesis of planer kinematic XY mechanisms[D].Cambridge:Massachusetts Institute of Technology, 2004.
10. Choi K B, Kim D H.Monolithic parallel linear compliant mechanism for two axes ultraprecision linear motion[J].Review of scientific instruments, 2006, 77(6): 065106.
11. Li Y, Xu Q.Design and analysis of a totally decoupled flexure-based XY parallel micromanipulator[J].Robotics, IEEE Transactions on, 2009, 25(3): 645-657.
12.Li Y, Xu Q.Modeling and performance evaluation of a flexure-based XY parallel micromanipulator[J].Mechanism and Machine Theory, 2009, 44(12): 2127-2152.
13. SU H J.Mobility Analysis of Flexure Mechanisms via Screw Algebra[J].Journal of mechanisms and robotics, 2011, 3(4):041010.
14. Hao G, Kong X.A novel large-range XY compliant parallel manipulator with enhanced out-of-plane stiffness[J]. Journal of Mechanical Design, 2012, 134: 061009.
15. Tang X, Chen I M.A large-displacement and decoupled XYZ flexure parallel mechanism for micromanipulation[C]//Automation Science and Engineering, 2006.CASE'06.IEEE International Conference on. Shanghai: Proceeding of the 2006 IEEE, 2006: 75-80.
16. Hopkins J B, Culpepper M L.Synthesis of precision serial flexure systems using freedom and constraint topologies(FACT)[J]. Precision Engineering, 2011, 35(4): 638-649.
17. 吴一雷,李永伟,强俊,等.超高强度铝合金的发展与应用[J].航空材料学报, 1994,14(1): 49-55.
18. 李守忠.基于旋量理论的柔性精微机构综合[D].北京:北京航空航天大学,2012: 17-43.
19. 单辉祖.材料力学(I)[M].北京:高等教育出版社,2009: 147-150.

备注/Memo

备注/Memo:
基金项目：国家自然科学基金资助项目(51175010); 教育部高校博士点基金优先资助项目(20111102130004) 作者简介:李振国(1987-),男,天津人,硕士生。
更新日期/Last Update: 2013-09-30