[1]谢 飞.渗氮-气相沉积硬质膜复合处理技术及其发展[J].常州大学学报(自然科学版),2001,(04):38-41.
 XIE Fei.Technique and Development of Duplex Treatment of Nitriding and Vapor Deposition of Hard Fi lms[J].Journal of Changzhou University(Natural Science Edition),2001,(04):38-41.
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渗氮-气相沉积硬质膜复合处理技术及其发展()
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常州大学学报(自然科学版)[ISSN:2095-0411/CN:32-1822/N]

卷:
期数:
2001年04期
页码:
38-41
栏目:
出版日期:
2001-12-25

文章信息/Info

Title:
Technique and Development of Duplex Treatment of Nitriding and Vapor Deposition of Hard Fi lms
作者:
谢 飞
江苏石油化工学院机械工程系, 江苏 常州 213016
Author(s):
XIE Fei
Department of Mechanical Engineering , Jiangsu Institute of Petrochemical Technology , Chang zhou 213016 , China
关键词:
渗氮气相沉积复合处理硬质膜
Keywords:
ni triding vapor deposition duplex t reatment hard fil
分类号:
TG 174.444 ;TG 156.8 +2
文献标志码:
A
摘要:
阐述了渗氮-气相沉积硬质膜复合处理的设计思想。从渗氮-气相沉积硬质膜复合处理工艺方法的选择、复合处理层组 织结构、性能研究等方面介绍了渗氮-气相沉积硬质膜复合处理技术的发展。
Abstract:
The principle is presented for designing duplex treatment of nitriding and vapor deposition of hard films.The development of the duplex treatment of nitriding and vapor deposition of hard films is int roduced from the points of selecting duplex treatment processes , improving the microst ructure and properties of the duplex -treated layer .

参考文献/References:

[1] 谢飞, 何家文.高速钢W18C r4V 离子渗氮层组织对TiN 膜与 基体结合强度的影响[J] .金属学报, 2000 , 36 (10):1 099 -1 103 .
[2] Hultman L , Hentzell H T G, Sundgren J -E , et al.Initial Grow th of TiN on Diff erent Phases of High Speed St eel [J] .T hin Solid Films , 1985 , 124 :163 -170 .
[3] Helmersson U , Johansson B -O , Sundgren J -E , et al.Adhesion of TiN Coat ings on High -speed S teels [J] .J Vac Sci Technol , 1985 , 3 (2):308 -315 .
[4] William A Brainard , Donald R Weeler .Use of a Nit rogen -argon Plasma t o Improve Adherence of Sputt ered Titanium Carbide Coatings on S teel [J] .J Vac S ci Technol , 1979 , 16 (1):31 -36 .
[5] Si rvio E H , Sulonen M , S undquist H .Abrasive Wear of Ion - plated Tit anium Nit ride Coat ings on Plasma -nit rided St eel Surf aces [J] .Thin Solid Films , 1982 , 96 :93 .
[6] Korhonen A S , Sirvio E H , Sulonen M .Plasma Nit riding and Ion Plating w ith an Int ensified Glow Discharge [J] .Thin S olid Films , 1983 , 108 :387 -394 .
[7] Sun Y, Bell T .Plasma Su rf ace Engineering of Low Allow Steel [J] .Mater Sci Eng , 1991 , A140 :419 -434 .
[8] Van St appen M , Malliet B , S tals L , et al.Charact erizat ion of TiN Coatings Deposited on Plasma Nit rided Tool S teel Surfaces [J] .Mater Sci Eng , 1991 , A140 :554 -562 .
[9] Buecken B , Leonhardt G , Wilberg R, et al.Direct Combinat ion of Plasma Nit riding and PVD Hardcoat ing by a Cont inuous Process [J] .S urf Coat Tech nol , 1994 , 68/ 69 :244 -248 .
[10] Leyland A , Fancey K S , Met thew s A .Plasma Ni triding in a Low Pressure Triode Di scharge to Provide Improvements in Adhesion and Load Support for Wear Resistant Coat ings [J] .S urf Eng , 1994 , 7 (3):207 -215 .
[11] Dingremont N , Pianelli A , Bergmann E , et al.Analysis of Compat ibi li ty of Plasma -nit rided S teels wi th Ceramic Coatings Deposit ed by the Ion -plat ing Technique [J] .S urf Coat Tech nol , 1993 , 61 :187 -193 .
[12] Michel H , Gantois M , Luit en C H .Heat Treatment [M] . London :Metal Societ y , 1984.1 -8 .
[13] D′Haen J , Quaeyhaegens C , St als L M , et al.Interface Study of Physical Vapour Deposition TiN Coat ings on Plasma -ni trided St eels [J] .Surf Coat Technol , 1993 , 61 :194 -200 .
[14] Saker A, Leroy Ch , MichelH .Properties of Sputt ered S tainless St eel-ni trogen Coatings and St ructural Analogy w ith Low Temperature Plasma Nit rided Layers of Austenite St eels [J] .Mater Sci Eng , 1991 , A140 :702 -708 .
[15] Quaeyhaegens C , Van St appen M , S tals L M , et al.In terf ace Study of Physically Vapour -deposit ed TiN Coatings on Plasma - nit rided Tool S teel Surfaces w ith Auger Elect ron S pect roscopy , Resonant Nuclear Reaction Analysis and Rutherf ord Back -scat tering Spectroscopy [J] .Surf Coat Technol , 1992, 54/ 55 :279 - 286 .
[16] Quaeyhaegens C , Satals L , Van St appen M , et al.In terf ace Study of TiN and Ti-TiN -coated S tainless S teel AIS I 304 w ith Asymmet ric Glancing Angle X-ray Diff ract ion and Classical Bragg -Brent ano X - ray Diff raction [J] .Thin Solid Films , 1991 , 197 :37 -46 .
[17] 谢飞.离子渗氮-等离子体增强化学气相沉积TiN 膜复合处 理研究[D] .西安:西安交通大学, 1997 .
[18] 谢飞, 何家文.渗氮-气相沉积TiN 复合处理膜基间“ 黑色 层” 形成机理分析[A] .葛启录.机械工程材料研究进展 [C] .北京:冶金工业出版社, 1998.379 -382 .
[19] Mi chalski J , Ellina Lunarska, Wierzchon T , et al.Wear and Corrosion Properties of TiN Layers Deposit ed on Nit rided High Speed St eel [J] .Su rf Coat Tech nol , 1995 , 72 :189 -195 .
[20] Gredic T , Zlatanovi c M , Popovic N , et al.Properties of TiN Coatings Deposi ted onto Hot Work S teel S ubstrat es Plasma Nit rided at Low Pressu re [J] .S urf Coat Technol , 1992 , 54/ 55 :502 -507 .
[21] 谢飞, 何家文.离子氮化-PECVD TiN 膜复合处理提高切边 模具寿命研究[J] .江苏石油化工学院学报, 2001 , 13 (1): 24 -27 .

相似文献/References:

[1]谢 飞,何家文.渗氮-气相沉积TiN 复合处理层 膜基间“黑色层” 组织的形成与控制[J].常州大学学报(自然科学版),2001,(02):5.
 XIE Fei,HE Jia -w en.The Formation and Controlling of “Black Layer” Between the Fi lm and Substrate of the Duplex -treated Layer by Nitriding and Vapor Deposited TiN[J].Journal of Changzhou University(Natural Science Edition),2001,(04):5.

备注/Memo

备注/Memo:
基金项目:国家自然科学基金资助项目(19392300 -5) 作者简介:谢飞(1964 -), 男, 上海人, 副教授, 博士, 主要从事材料表面工程方面的研究。
更新日期/Last Update: 2001-12-25