[1]范利宁,袁宁一,李金华.退火条件对ZnO 薄膜结构和光学性能的影响[J].常州大学学报(自然科学版),2007,(02):4-6.
 FAN Li -ning,YUAN Ning -yi,LI Jin -hua.Influence of Annealing Temperature on Structure and Optical Properties of Zinc Oxide Films[J].Journal of Changzhou University(Natural Science Edition),2007,(02):4-6.
点击复制

退火条件对ZnO 薄膜结构和光学性能的影响()
分享到:

常州大学学报(自然科学版)[ISSN:2095-0411/CN:32-1822/N]

卷:
期数:
2007年02期
页码:
4-6
栏目:
出版日期:
2007-06-25

文章信息/Info

Title:
Influence of Annealing Temperature on Structure and Optical Properties of Zinc Oxide Films
作者:
范利宁 袁宁一 李金华
江苏工业学院功能材料实验室, 江苏 常州 213164
Author(s):
FAN Li -ning YUAN Ning -yi LI Jin -hua
Functional Materials Laboratory , Jiangsu Poly technic Universtiy , Changzhou 213164 , China
关键词:
ZnO 薄膜溶胶-凝胶法光学性能退火温度
Keywords:
ZnO films sol -gel method optical properties annealing temperature
分类号:
T B 43 ;O 552.6
文献标志码:
A
摘要:
采用溶胶-凝胶法在单晶硅Si (100) 衬底上制备了ZnO 薄膜, 研究了退火温度对ZnO 结构和光学性能的影响。实验发 现, 退火可以明显地改善ZnO 薄膜的结构和光学性能。随着退火温度的升高, ZnO 薄膜的晶粒增大, 同时在室温下观察到明显 的紫外发光现象, 其紫外PL 谱峰值变强, 并有红移现象。
Abstract:
ZnO films were fabricated by Sol -Gel method on (001) Si substrates .The influence of annealing temperature on structure and optical properties of ZnO films was investig ated .Annealing could improve crystallization and optical properties of ZnO films evidently .With the annealing temperature increasing , the grain size became larger and ultraviolet emission was observed at room temperature .While annealing temperature was higher , PL peak was stronger and had a little red shift .

参考文献/References:

[1] Shan thi S , Subramanian C , Ramasamy P .Grow th and characterization of ant imony doped t in oxide thin films [J] .Journal of Crystal Grow th , 1999 , 197 (4):858 -864.
[2] Bagnall D M , C hen Y F , Zhu Z , et al.Optical pumped lasing of ZnO at room t emperature [J] .Applied Physics Lett ers , 1997 , 70 (17):2 230 -2 232.
[3] Lok hande B J , Patil P S , Up lane M D.Deposit ion of highly orient ed ZnO films by spray pyrolysis and thei r structural , opt ical and electrical charact erizat ion [J] .Material Lett ers , 2002 , 57 (3): 573 -579.
[4] Pu ricaM , Budianu E , Rusu E , et al.Optical and st ructural investigat ion of ZnO th in films prepared by chemical vapor deposi tion (CVD)[J] .Thin Solid Films , 2002 , 403 -404 :485 -488.
[5] Ye Z Z , Chen H H , Liu R, et al.St ructure and PL spectrum of ZnO fi1ms prepared by DC react ive magnet ron sput tering [J] . Chinese Journal of Semiconduct ors , 2001 , 22 :1 015 -1 020.
[6] Shan F K , Shin B C , Jang S W , et al.S ubst rat e ef fects of ZnO thin fi lm s prepared by PLD technique [J] .Journal of the European Ceramic Societ y , 2004 , 24 (6):1 015 -1 018.
[7] Bao D , Kuang A , Gu H .Sol-Gel derived c-axi s o riented ZnO thin fi lm s [J] .Thin S olid Films , 1998 , 312 :37 -39.
[8] Zhang X T , Liu Y C , Zhi Z Z , et al.High intense U -V -luminescence of nanocrystalline ZnO thin films prepared by thermal oxidation of ZnS thin f ilms [J] .Jou rnal of Crystal Grow th , 2002 , 240 :463 -466 .

相似文献/References:

[1]赵 蒙,李金华,郑巍峰,等.Ta 掺杂VO2 多晶薄膜的相变特性[J].常州大学学报(自然科学版),2009,(04):24.
 ZHAO Meng,LI Jin -hua,ZHENG Wei -feng,et al.Phase Transition Properties of Tantalum Doped Polycrystalline Thin Film Formed by Sol -Gel Method[J].Journal of Changzhou University(Natural Science Edition),2009,(02):24.
[2]李金华,袁宁一,李 坤,等.二氧化锡衬底上Sol -Gel PLT 膜的性能研究[J].常州大学学报(自然科学版),2001,(02):1.
 LI Jin -hua,YUAN Ning -yi,LI Kun,et al.Fer roelectr ic Proper ties of Sol -Gel PLT Films on Tin -oxide Electrodes[J].Journal of Changzhou University(Natural Science Edition),2001,(02):1.
[3]袁宁一,李金华,林成鲁.Sol -Gel V2O5 薄膜的成膜和取向研究[J].常州大学学报(自然科学版),2001,(04):1.
 YUAN Ning -yi,LI Jin -hua,LIN Chen -lu.The Investigation of Growth of Sol -Gel V2O5 Films[J].Journal of Changzhou University(Natural Science Edition),2001,(02):1.
[4]李 坤,陈王丽华,蔡忠龙,等.钛酸锶钡溶胶制备研究[J].常州大学学报(自然科学版),2000,(01):1.
 LI Kun,H .L .W .Chan,C .L .Choy,et al.Preparation and Proper ties of (Sr0.2Ba0.8)TiO3 Solution[J].Journal of Changzhou University(Natural Science Edition),2000,(02):1.

备注/Memo

备注/Memo:
基金项目:江苏省自然科学基金项目(BK2006042) 作者简介:范利宁(1976 -), 女, 黑龙江嫩江人, 硕士研究生。
更新日期/Last Update: 2007-06-25