[1]胡佳佳,叶雪梅,胡 静.热处理对微型磁致伸缩材料传感器磁性能的影响[J].常州大学学报(自然科学版),2015,(02):35-38.[doi:10.3969/j.issn.2095-0411.2015.02.008]
　HU Jia-jia,YE Xue-mei,HU Jing.Effect of Annealing on the Performance of Microscale Magnetostrictive Sensors[J].Journal of Changzhou University(Natural Science Edition),2015,(02):35-38.[doi:10.3969/j.issn.2095-0411.2015.02.008]
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热处理对微型磁致伸缩材料传感器磁性能的影响()
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常州大学学报(自然科学版)[ISSN:2095-0411/CN:32-1822/N]

卷:
期数:
2015年02期
页码:
35-38
栏目:
材料科学与工程
出版日期:
2015-04-25

文章信息/Info

Title:
Effect of Annealing on the Performance of Microscale Magnetostrictive Sensors
作者:
胡佳佳1; 2 ; 叶雪梅1 ; 胡 静1; 2
(1.常州大学 材料科学与工程学院，江苏 常州 213164；
2.奥本大学 材料系，阿拉巴马 奥本 36849)
Author(s):
HU Jia-jia1; 2; YE Xue-mei1; HU Jing1; 2
（1.School of Materials Science and Engineering,Changzhou University,Changzhou 213164,China；
2.Department of Materials Engineering,Auburn University,Auburn 36849,USA）
关键词:
磁致伸缩材料; 传感器; MEMS; 退火; 内应力
Keywords:
magnetostrictive materials; sensors; MEMS; annealing; internal stresses
分类号:
TG 75.5
DOI:
10.3969/j.issn.2095-0411.2015.02.008
文献标志码:
A
摘要:
采用MEMS技术制备了尺寸为500μm × 100μm ×15μm的微尺度磁致伸缩材料传感器，发现MEMS技术沉积过程中传感器内部不可避免地产生了内应力，对传感器磁性能带来不利影响。对微尺度磁致伸缩材料传感器进行真空热处理，旨在消除内应力，进一步提高传感器磁学性能。结果表明：真空退火可减小或消除传感器内应力，提高磁学性能，其中最佳退火温度为250℃，时间为2h。该温度下退火不仅可完全释放传感器内应力，还可以改善波谱质量，提高共振频率。
Abstract:
Microscale magnetostrictive sensors with the size of 500〖KG3x〗μm × 100〖KG3x〗μm ×15〖KG3x〗μm were prepared by MEMS technique.It was found that there inevitably existed internal stresses in the sensors formed during the MEMS producing process,which would bring side effect on the magnetic sensor performance.Vacuum heat treatment was conducted to the magnetostrictive sensors in this research,the goal is to eliminate the internal stresses,and thus improve the sensors’ magnetic performance.The results showed that the vacuum annealing can reduce or eliminate internal stresses,improve the magnetic properties,and the optimum annealing condition is 250〖KG3x〗℃ for 2〖KG3x〗h,which can fully release the internal stress of the sensors,improve the spectral quality,and significantly increase the resonance frequency.

参考文献/References:


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备注/Memo

备注/Memo:
国家自然科学基金（51271039）。
更新日期/Last Update: 2015-05-20